Authors:
- Reviews exhaustively the key recent research into the design and fabrication of micro and nanomechanical resonators
- Provides a complete set of mechanical models, including strings and membrane resonators
- Maximizes reader insights into nanomechanical sensing, transduction, and noise and measurements for micro and nanomechanical resonators
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Table of contents (5 chapters)
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Front Matter
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Back Matter
About this book
Keywords
- Resonance frequency
- Eigenmodes
- Continuum mechanical structures
- Vibrations
- Liquid damping
- Gas damping
- Clamping loss
- Intrinsic damping
- Frequency response
- Transduction
- Amplitude noise
- Frequency noise
- Nanomechanical sensing
- Resonator crystal
- Thermoelastic actuation
- String resonators
- Top-down fabrication
Authors and Affiliations
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Vienna University of Technology, Wien, Austria
Silvan Schmid
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École Polytechnique Fédérale de, Lausanne, Switzerland
Luis Guillermo Villanueva
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California Institute of Technology, Pasadena, USA
Michael Lee Roukes
About the authors
Guillermo Villanueva is Professor at Ecole Polytechnique Federale de Lausanne (EPFL). His fields of expertise are MEMS/NEMS, sensors, oscillators, nonlinear and coupled dynamics, and fundamental noise processes.
Michael Lee Roukes is Robert M. Abbey Professor of Physics, Applied Physics, and Biological Engineering at California Institute of Technology. He was founding Director of Caltech’sKavli Nanoscience Institute from 2003-2006, and Co-Director from 2008-2013.
Bibliographic Information
Book Title: Fundamentals of Nanomechanical Resonators
Authors: Silvan Schmid, Luis Guillermo Villanueva, Michael Lee Roukes
DOI: https://doi.org/10.1007/978-3-319-28691-4
Publisher: Springer Cham
eBook Packages: Engineering, Engineering (R0)
Copyright Information: Springer International Publishing Switzerland 2016
Softcover ISBN: 978-3-319-80406-4Published: 30 May 2018
eBook ISBN: 978-3-319-28691-4Published: 21 June 2016
Edition Number: 1
Number of Pages: VIII, 175
Number of Illustrations: 24 b/w illustrations, 66 illustrations in colour
Topics: Engineering Design, Robotics and Automation, Nanotechnology and Microengineering