Fundamentals of Nanomechanical Resonators

1. Front Matter

   Pages i-viii

   PDF

2. Resonance Frequency

   • Silvan Schmid, Luis Guillermo Villanueva, Michael Lee Roukes

   Pages 1-56

3. Quality Factor

   • Silvan Schmid, Luis Guillermo Villanueva, Michael Lee Roukes

   Pages 57-90

4. Responsivity

   • Silvan Schmid, Luis Guillermo Villanueva, Michael Lee Roukes

   Pages 91-114

5. Transduction

   • Silvan Schmid, Luis Guillermo Villanueva, Michael Lee Roukes

   Pages 115-147

6. Measurement and Noise

   • Silvan Schmid, Luis Guillermo Villanueva, Michael Lee Roukes

   Pages 149-172

7. Back Matter

   Pages 173-175

   PDF

This authoritative book introduces and summarizes the latest models and skills required to design and fabricate nanomechanical resonators with a focus on nanomechanical sensing. It also establishes the theoretical foundation for courses on micro and nanomechanics. This book takes an applied approach to nanomechanics, providing a complete set of mechanical models, including strings and membrane resonators. Also discussed are quality factors, noise issues, transduction techniques, nanomechanical sensing, fabrication techniques, and applications for all common nanomechanical resonator types. It is an ideal book for students and researchers working with micro and nanomechanical resonators.

• Resonance frequency
• Eigenmodes
• Continuum mechanical structures
• Vibrations
• Liquid damping
• Gas damping
• Clamping loss
• Intrinsic damping
• Frequency response
• Transduction
• Amplitude noise
• Frequency noise
• Nanomechanical sensing
• Resonator crystal
• Thermoelastic actuation
• String resonators
• Top-down fabrication

• Vienna University of Technology, Wien, Austria

  Silvan Schmid

• École Polytechnique Fédérale de, Lausanne, Switzerland

  Luis Guillermo Villanueva

• California Institute of Technology, Pasadena, USA

  Michael Lee Roukes

Silvan Schmid is Associate Professor of Micro and Nanotechnology at the Technical University of Denmark. His research focus is in micro- and nanomechanical resonators for sensor applications and fundamental research.

Guillermo Villanueva is Professor at Ecole Polytechnique Federale de Lausanne (EPFL). His fields of expertise are MEMS/NEMS, sensors, oscillators, nonlinear and coupled dynamics, and fundamental noise processes.



Michael Lee Roukes is Robert M. Abbey Professor of Physics, Applied Physics, and Biological Engineering at California Institute of Technology. He was founding Director of Caltech’sKavli Nanoscience Institute from 2003-2006, and Co-Director from 2008-2013.

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